KLA wafer defect inspection and review systems
Manufacturing EquipmentProcess-control equipment for detecting and reviewing defects during semiconductor manufacturing.
View solutionWafer fabrication
Foundries, process nodes and specialty processes.
Showing 25–36 of 40 solutions.
Provider
KLA wafer defect inspection and review systems
Manufacturing EquipmentLam Research Etch and Deposition
Wafer fabrication
Lam Research wafer-process equipment category for thin-film deposition, plasma etch, strip, clean and related fabrication steps. SABRE ECD is listed separately.
View solutionLam Research SABRE Electrochemical Deposition
Wafer fabricationLam Research SABRE is an electrochemical copper-deposition platform for damascene interconnect, including logic, memory and high-bandwidth memory wiring. Distinct from Lam’s broader etch category.
View solutionNova Prism
Manufacturing Equipment
Nova describes Prism as an optical critical-dimension metrology platform that combines spectral information with modeling and machine learning.
View solutionPlasma Etch Platform
Wafer fabrication
NAURA’s plasma etch platform is a wafer-fabrication etch tool family published on NAURA’s official product pages.
View solutionPrimo Etch Platform
Wafer fabrication
AMEC Primo is a plasma etch equipment platform published on AMEC’s official product pages.
View solutionRH90
Foundries
SkyWater RH90 is a radiation-hardened 90 nm CMOS foundry process, not processor IP and not a packaged rad-hard MCU.
View solutionSU Series Single-Wafer Cleaning
Wafer fabrication
SCREEN SU Series is a single-wafer cleaning equipment family, currently described through SU-3400.
View solutionSUMCO Silicon Wafers
Manufacturing Materials
SUMCO describes silicon wafers as polished disks sliced from high-purity silicon and used as the starting material for semiconductor devices.
View solutionSamsung GAA MBCFET Process
Foundries
Samsung’s 3 nm foundry node introduced Gate-All-Around transistors as Multi-Bridge-Channel FETs (MBCFET): stacked nanosheet channels with the gate on all four sides, replacing FinFET for better electrostatic control.
View solutionSiGe BiCMOS Platform
Foundries
Tower Semiconductor SiGe BiCMOS is a specialty analog/RF foundry process combining silicon-germanium HBTs with CMOS.
View solutionSoitec Engineered Substrates
Manufacturing Materials
Soitec lists engineered-substrate platforms including FD-SOI, RF-SOI, Power-SOI, and Photonics-SOI.
View solution