NOV152026
Conference
SC26
- November 15 – 20, 2026
- Chicago, Illinois, USA
- Organized by SC Conference Series
Public source
SU Series Single-Wafer Cleaning
SU Series Single-Wafer Cleaning is a publicly named SCREEN SPE cleaning platform.
Overview
SCREEN SU Series is a single-wafer cleaning equipment family, currently described through SU-3400.
Official SU-3400 pages describe a 24-chamber, six-tier single-wafer cleaner with up to 1,200 wph. The organization URL uses SCREEN SPE rather than the 403 /eng/ corporate path. This listing records the SU Series rather than every SCREEN wet tool.
Technical capabilities
SU-3400 as the current published generation
Not a batch wet-bench listing
Lifecycle and categories
- Lifecycle stages
- Wafer fabrication
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