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Nova Prism

Nova describes Prism as an optical critical-dimension metrology platform that combines spectral information with modeling and machine learning.

Overview

It is not design IP. The retired generic metrology-platform slug is not reused. Confirm whether the required tool is Prism or a later generation, and which film or structure it is specified to measure.

Technical capabilities

  • Manufacturing equipment

    This is metrology equipment. It is not design IP. The retired generic metrology-platform slug is not reused.

  • Availability

    Listed by the provider. Confirm the configuration before use.

Lifecycle and categories

Lifecycle stages
Wafer fabrication
Solution categories
Manufacturing Equipment
Compatibility
Pricing, licensing, and configuration availability require provider confirmation. Source

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