NOV152026
Conference
SC26
- November 15 – 20, 2026
- Chicago, Illinois, USA
- Organized by SC Conference Series
Public source
Batch ALD
Batch ALD is a publicly named Kokusai Electric deposition technology.
Overview
Kokusai Batch ALD combines atomic-layer deposition with multi-wafer batch furnaces for 3D device films.
Official Kokusai business pages describe batch ALD as combining ALD step coverage with batch productivity for deeper, narrower 3D structures. This listing records Batch ALD rather than every Kokusai furnace SKU.
Technical capabilities
Furnace ALD rather than a single-wafer ALD SKU catalog
Lifecycle and categories
- Lifecycle stages
- Wafer fabrication
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