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Applied Materials Endura PVD

Endura is Applied Materials’ publicly named ultra-high-vacuum metallization platform.

Overview

Official product pages describe Endura PVD as a multi-chamber system for depositing ultra-pure films used in front-end metallization, aluminum and copper interconnect, and related packaging metallization. The platform can host multiple process and preclean chambers for integrated sequences under vacuum. Endura is a metallization/PVD equipment platform, not the newer Vistara wafer-manufacturing chassis, which is listed separately. Chamber options, film stacks and performance data should be confirmed with Applied Materials.

Lifecycle and categories

Lifecycle stages
Wafer fabrication

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