NOV152026
Conference
SC26
- November 15 – 20, 2026
- Chicago, Illinois, USA
- Organized by SC Conference Series
Public source
ACTIS
ACTIS is a publicly named Lasertec actinic EUV mask inspection family, including the ACTIS A300 product page.
Overview
Lasertec ACTIS is an actinic EUV photomask inspection platform for high-volume EUV mask qualification.
Official Lasertec pages present ACTIS as inspection of EUV masks at actinic wavelength. This listing records the ACTIS platform rather than every inspection tool Lasertec sells. Configuration details should be confirmed on Lasertec’s current ACTIS pages.
Technical capabilities
Mask qualification rather than wafer defect inspection
Lifecycle and categories
- Lifecycle stages
- Test and qualification
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