SINGLE-WAFER CLEANING EQUIPMENT
Single-wafer cleaning equipment family
Single-wafer cleaning equipment family
SU-3400 as the current published generation
Automotive · AI & HPC · Consumer Electronics
Public source
SU Series Single-Wafer Cleaning is a publicly named SCREEN SPE cleaning platform.
Silicon Showcase illustrative visual
Illustrative representation based on publicly available technical information.
SCREEN SU Series is a single-wafer cleaning equipment family, currently described through SU-3400.
Official SU-3400 pages describe a 24-chamber, six-tier single-wafer cleaner with up to 1,200 wph. The organization URL uses SCREEN SPE rather than the 403 /eng/ corporate path. This listing records the SU Series rather than every SCREEN wet tool.
Key characteristics associated with this technology.
Single-wafer cleaning equipment family
SU-3400 as the current published generation
Not a batch wet-bench listing
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