PLANETARY REACTOR MOCVD
Planetary Reactor MOCVD architecture
Planetary Reactor MOCVD architecture
Compound-semiconductor epitaxy equipment
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Planetary Reactor MOCVD is a publicly named Aixtron epitaxy architecture.
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Aixtron Planetary Reactor is a batch MOCVD reactor architecture for compound-semiconductor epitaxy.
Official Aixtron planetary-principle pages describe the Planetary Reactor® as a horizontal laminar-flow, multi-wafer MOCVD concept still used in current GaN production tools. This listing records Planetary Reactor rather than every G10 or G5 SKU.
Key characteristics associated with this technology.
Planetary Reactor MOCVD architecture
Compound-semiconductor epitaxy equipment
Not a silicon CVD listing
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