OPTICAL AND MATERIALS
Optical and materials metrology platform
Optical and materials metrology platform
Process-control metrology rather than a tester
Automotive · AI & HPC · Data Center
Public source
Multidisciplinary Metrology Platform is Nova’s publicly named process-control technology set.
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Illustrative representation based on publicly available technical information.
Nova’s multidisciplinary metrology platform combines optical scatterometry, X-ray and materials analysis for process control.
Official Nova technology pages describe dimensional optical scatterometry plus materials methods such as XPS, XRF and Raman. This listing records the metrology platform rather than every Nova tool SKU.
Key characteristics associated with this technology.
Optical and materials metrology platform
Process-control metrology rather than a tester
Not a single-tool SKU catalog
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