MEMS RESONATOR FABRICATION
MEMS resonator fabrication and epitaxial sealing
MEMS resonator fabrication and epitaxial sealing
Process platform rather than an oscillator catalog
Automotive · Data Center · Telecommunications · +1
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MEMS First and EpiSeal are publicly named SiTime processes for manufacturing hermetically sealed silicon resonators on CMOS tools.
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Illustrative representation based on publicly available technical information.
SiTime MEMS First and EpiSeal are resonator fabrication processes that encapsulate silicon MEMS in epitaxial vacuum cavities.
Official SiTime technology papers describe DRIE resonator definition, HF release and high-temperature epitaxial sealing. This listing records the MEMS First / EpiSeal process rather than every oscillator SKU.
Key characteristics associated with this technology.
MEMS resonator fabrication and epitaxial sealing
Process platform rather than an oscillator catalog
Not a quartz-crystal listing
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