MODULAR WAFER-FAB PLATFORM
Modular wafer-fab platform supporting multiple chamber types
Modular wafer-fab platform supporting multiple chamber types
Described for sequential process steps under vacuum
AI & HPC · Data Center
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Vistara is a named Applied Materials semiconductor manufacturing platform described as a modular system for running complex process sequences.
Official technology image
Modular semiconductor wafer-manufacturing chassis from Applied Materials for combining multiple chamber types on one system. Distinct from the Endura metallization platform.
Official product material presents flexibility, in-system sensing and sustainability-oriented design as the platform’s organizing ideas, including support for a range of chamber types and counts on one tool. Applied Materials also describes using the platform for Integrated Materials Solution sequences that keep sequential process steps under vacuum. Vistara is a wafer-manufacturing chassis, not a synonym for Applied’s Endura PVD/metallization platform, which is listed separately. Chamber options, recipes and performance data should be confirmed with Applied Materials.
Key characteristics associated with this technology.
Modular wafer-fab platform supporting multiple chamber types
Described for sequential process steps under vacuum
Positioned for complex semiconductor process recipes on a single system
Distinct from the separately listed Endura metallization platform
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